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Delroy Baugh, Ph.D.Work Email Address:dab@chem.ucla.eduLaboratory Address:Young Hall 2042Mailing Address:Box 951569 (post)607 Charles E. Young Drive East (courier) Los Angeles, CA Work Address:Young Hall 2048Fax Number:1 (310) 206-4038Work Phone Number:1 (310) 206-1485
A Short Biography:Dr. Baugh received his BS, MS and PhD from the University of Southern California. Awards and Honors:NSF Young Investigator Award ; University of California President's Postdoctoral Fellow Research Interest:In our surface experiments atomic radical beams are scattered from and/or reacted with clean, well characterized(e.g. using LEED, Auger, and He diffraction) single crystal (or amorphous) surfaces. Atomic radicals are generated by photodissociating diatomic molecules and relying on kinematics to propel the desired atoms towards the surface. These intense, pulsed beams are short (~ 150 nanoseconds) and have well defined kinetic energy which can be continuously tuned simply by scanning the photolysis laser frequency. Ultra-sensitive laser schemes are used to measure the energy level populations and angular momentum polarization of the gas phase products and grazing incidence Auger electron spectroscopy is used to detect the surface adsorbed reaction products. These experiments are performed in a new ultra-high vacuum chamber that was specifically designed to study the details of radical-surface chemistry. These experiments provide detailed information on the etching of semiconductor surfaces by halogen and hydrogen plasmas and by reactive ion beams.
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